Patent holdings for IPC class G03F 9/02

Total number of patents in this class: 15

10-year publication summary

2
0
1
2
0
1
1
0
0
0
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Nikon Corporation
7162
6
FUJIFILM Corporation
27102
1
Cymer, LLC
347
1
ASML Netherlands B.V.
6816
1
Fujikura Ltd.
2777
1
Northwestern University
3112
1
Intevac, Inc.
127
1
Screen Holdings Co., Ltd.
2431
1
Shanghai Micro Electronics Equipment Co., Ltd.
56
1
Shanghai Micro Electronics Equipment (Group) Co., Ltd.
243
1
Other owners 0